25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography
- Zhi Chen
- Lijing Zhong
- Xiangyu Sun
- Yihui Fu
- Huilin He
- Huijiao Ji
- Yuying Wang
- Xiaofeng Liu
- Beibei Xu
- Zhemin Wu
- Chen Zou
- Zhijun Ma
- Jingyu Zhang
- Guoping Dong
- Giuseppe Barillaro
- Cheng-Wei Qiu
- Jianbei Qiu
- Jianrong Qiu
2025-08-12