3D nanolithography with metalens arrays and spatially adaptive illumination
- Songyun Gu
- Chenkai Mao
- Anna Guell Izard
- Sarvesh Sadana
- Dongping Terrel-Perez
- Magi Mettry-Yassa
- Wonjin Choi
- Wenjie Zhou
- Hujie Yan
- Ziran Zhou
- Travis Massey
- Alex Abelson
- You Zhou
- Sijia Huang
- Chiara Daraio
- Thejaswi Umanath Tumkur
- Jonathan A. Fan
- Xiaoxing Xia
2025-12-17