Nature Communications

Atomic-scale mechanism unlocks thermal-stable high-κ performance in HfO2 via coherent interfaces

• Yihao Shen
• Hongzheng Wang
• Xiaochun Ma
• Yuxiao Liu
• Fei Liang
• Shuxian Wang
• Pengfei Nan
• Binghui Ge
• Shujun Zhang
• Haohai Yu
• Huaijin Zhang

2026-01-16

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DOI https://doi.org/10.1038/s41467-026-68496-z