Nature CommunicationsControllable growth of MoO3 dielectrics with sub-1 nm equivalent oxide thickness for 2D electronicsXueming LiShankun XuZhengfan ZhangZhouquan YuZhidong PanYujue YangXubing LuNengjie Huo2025-07-22Full textDOI https://doi.org/10.1038/s41467-025-61972-y