Copper damascene process-based high-performance thin-film lithium tantalate modulators
- Mengxin Lin
- Zihan Li
- Alexander Kotz
- Hugo Larocque
- Nikolai Kuznetsov
- Jiale Sun
- Yichi Zhang
- Shuhang Zheng
- Johann Riemensberger
- Christian Koos
- Tobias J. Kippenberg
2026-02-26