Enhancing film bulk acoustic resonators performance by optimizing AlN seed layer crystallinity and polarity alignment
- Tingting Yang
- Qinwen Xu
- Yaxin Wang
- Yao Cai
- Haiyang Li
- Yupeng Zheng
- Min Zeng
- Jingyi Qu
- Lei Li
- Chao Gao
- Xiyu Gu
- Binghui Lin
- Shishang Guo
- Cheng Lei
- Sheng Liu
- Chengliang Sun
2026-02-06