Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking and degradation of poly(2,3-dihydrofuran)
- Jun-Dan Huang
- Xiao Tan
- Jun Liu
- Bo Zhao
- Hong-Qiang Li
- Ying-Yi Ren
- Rui Tian
- Yisi Xiong
- Chong Li
- Ming-Kui Wang
- Shi-Li Xiang
- Ming-Qiang Zhu
2026-08-20