Nature Communications

Giant piezoelectric response and electromechanical coupling in AlScN thin films via multi-scale lattice engineering

• Zhenyue Cheng
• Tong Liu
• Daojian Su
• Changhong Yang
• Chuancheng Wu
• Yao Liu
• Wei Sun
• Shifeng Huang
• Zhenxiang Cheng

2026-08-10

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DOI https://doi.org/10.1038/s41467-026-76543-y