Nature Communications

High-κ dielectric van der Waals integration on 2D semiconductors for three-dimensional complementary logic systems

• Taeho Kang
• Joonho Park
• Seung Yong Lee
• Hanggyo Jung
• Jongwook Jeon
• Yong-Hoon Kim
• Sungjoo Lee

2025-11-25

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DOI https://doi.org/10.1038/s41467-025-66770-0