Nature

Monolithic 3D integration of tantalum pentoxide nonlinear photonics

• Grant M. Brodnik
• Grisha Spektor
• Lindell M. Williams
• Jizhao Zang
• Alexa R. Carollo
• Atasi Dan
• Jennifer A. Black
• David R. Carlson
• Scott B. Papp

2026-04-15

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DOI https://doi.org/10.1038/s41586-026-10379-w