Nature

Monolithic three-dimensional integration of silicon transistors

• Bao Lam
• Yung Man Yu
• Hyunjun Nam
• Hsu-Chih Ni
• Shomik Chatterjee
• Shaloo Rakheja
• Jian-Min Zuo
• Qing Cao

2026-05-27

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DOI https://doi.org/10.1038/s41586-026-10496-6