Monolithically integrated silicon photonic biaxial FMCW LiDAR system
- Mathias Prost
- Huaqing Qiu
- Guillaume Croes
- Manuel Reza
- Jac Romme
- Rainer Hornung
- Javier Pérez Santacruz
- Elbert Bechthum
- Ziduo Lin
- Jochem Govers
- Pawel Bembnowicz
- Brecht Berteloot
- Esteban Venialgo
- Erik Emmen
- Felipe Pacheco de Oliveira
- Shahzad Muzaffar
- Evgenii Tiurin
- Paul Mateman
- Nicolas Chauvet
- Peter Girouard
- Tangla D. Kongnyuy
- Mennatallah Kandil
- Maliheh Ramezani
- Puvendren Subramaniam
- Padraic E. Morrissey
- Sean Collins
- Matthew L. Hall
- Peter O’Brien
- Noor Schilder
- Christian Bachmann
- Joost Brouckaert
- Ruud Oldenbeuving
- Dongjae Shin
- Roelof Jansen
- Peter Gerets
- Marcus Dahlem
2026-09-04
Three-dimensional sensing is critical for autonomous systems, robotics and industrial monitoring, motivating compact frequency-modulated continuous-wave (FMCW) LiDARs, which optically measure distance and velocity. However, current integrated designs using optical phased arrays (OPAs) for beam steering or focal-plane arrays (FPAs) for parallel reception face trade-offs in optical power, aperture and acquisition speed. Here we show a biaxial FMCW LiDAR that monolithically integrates an OPA transmitter and coherent FPA receiver with over 4500 functional components on separate optical paths, eliminating the need for circulators. A line-shaped beam enables agile steering, while a lens-assisted FPA provides a large receiving aperture and parallel single-wavelength readout. The system images at 20 m using 3.7 mW of emitted power, with 5 cm depth resolution and 1.4 mm/s velocity resolution. It produces point clouds at 10 frames per second (fps) and supports acquisition rates up to 41 fps, offering a compact and practical route towards integrated FMCW LiDAR.