Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
- Tom Vanackere
- Artur Hermans
- Ian Christen
- Christopher Panuski
- Mark Dong
- Matthew Zimmermann
- Hamza Raniwala
- Andrew J. Leenheer
- Matt Eichenfield
- Gerald Gilbert
- Dirk Englund
2025-11-26