Sacrifice-layer-free transfer of wafer-scale atomic-layer-deposited dielectrics and full-device stacks for two-dimensional electronics
- Yuyu He
- Zunxian Lv
- Zhaochao Liu
- Mingjian Yang
- Wei Ai
- Jiabiao Chen
- Wanying Chen
- Bing Wang
- Xuewen Fu
- Feng Luo
- Jinxiong Wu
2025-07-01