Nature CommunicationsTemperature-insensitive nanomechanical resonators in CMOS oxidesJinghan GaoTroy TharpeNuohao LiuRatul KunduFaysal HakimBanafsheh JabbariIzabela SzlufarskaBaibhab ChatterjeeRoozbeh Tabrizian2026-09-08Full textDOI https://doi.org/10.1038/s41467-026-77388-1