Nature CommunicationsUltracompact and large-bandwidth silicon modulator in a CMOS-compatible foundryHua ZhongJingchi LiYu HeHongwei WangYuqi ChenYong ZhangXingfeng LiYuhan DuYikai Su2025-12-18Full textDOI https://doi.org/10.1038/s41467-025-67826-x