Nature Communications

Wafer-scale 2D MoS2 transistors with self-aligned angstrom gate length and nanometer channel length

• Ziming Wang
• Anhan Liu
• Hengbin Ding
• Fan Wu
• Caifang Gao
• Yizhe Guo
• Ruifang Xue
• Peigen Zhang
• Yanming Liu
• Tao Deng
• Tian-Ling Ren
• He Tian

2026-07-11

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DOI https://doi.org/10.1038/s41467-026-75409-7